In 2010, I participated in a research cooperation
project “Design and development of positioning system of Atomic Force
Microscopy” in Institute of Physics of Academia Sinica, the highest research
institution in Taiwan, and worked on my thesis, “Design and Development of
Biaxial Nano-scale Positioning System.” I
helped my group improve the previous actuator, and I developed a biaxial
long-stroke and nanometer-scale positioning system controlled by a
user-friendly interface on PC. (see Fig. 1)
Fig. 1 Biaxial Nano-scale Positioning System
The positioning system is built up by three
subsystems, which include two linear actuators, two displacement sensors, and one
positioning controller. (see Fig. 2) Each piezo actuator is driven by an inertial driving principle,
and a flat-circular spring is applied to provide guiding and reduce friction. Also,
the HOE pick-up head is chosen as a displacement sensor for building a compact
positioning system. Then, our team successfully applied this system to
establish a specimen vehicle in a Scanning Probe Microscope.(see Fig. 3 & Fig. 4) During my graduate school years, I not only
improved my skills of programming and integrating software and hardware, but
also showed my strength in teamwork.
Fig. 2 Structure and Subsystems of the Positioning System
Fig. 3 Calibration of the Positioning System by Interferometer
Fig. 4 Performance test of Nano-scale Positioning System
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